The effects of annealing on disorder preservation in ion implanted InP
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Overview
status
publication date
- January 1987
has subject area
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics (FoR)
- 0402 Geochemistry (FoR)
- 0915 Interdisciplinary Engineering (FoR)
- Applied Physics (Science Metrix)