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Low energy ion induced damage in silicon at 50 K
Journal Articles
Overview
Research
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Additional Document Info
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Overview
authors
Thompson, David Allan
Walker, RS
status
published
publication date
January 1976
published in
Nuclear Instruments and Methods
Journal
Research
keywords
Instruments & Instrumentation
Nuclear Science & Technology
Science & Technology
Technology
Identity
Digital Object Identifier (DOI)
10.1016/0029-554x(76)90746-1
Additional Document Info
start page
281
end page
284
volume
132
issue
JAN-F