The Effect of the Native Oxide on Mask Undercutting of V‐Grooves Etched into (100) InP Surfaces Using an SiN x Mask
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Overview
status
publication date
- February 1, 1995
has subject area
- 0303 Macromolecular and Materials Chemistry (FoR)
- 0306 Physical Chemistry (incl. Structural) (FoR)
- 0912 Materials Engineering (FoR)
- Energy (Science Metrix)