Journal article
On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays
Abstract
A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.
Authors
Boisset GC; Robertson B; Hsiao WS; Taghizadeh MR; Simmons J; Song K; Matin M; Thompson DA; Plant DV
Journal
IEEE Photonics Technology Letters, Vol. 8, No. 7, pp. 918–920
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
July 1, 1996
DOI
10.1109/68.502270
ISSN
1041-1135