On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays Journal Articles uri icon

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authors

  • Boisset, GC
  • Robertson, B
  • Hsiao, WS
  • Taghizadeh, MR
  • Simmons, J
  • Song, K
  • Matin, M
  • Thompson, David Allan
  • Plant, DV

publication date

  • July 1996