RIE of GaSb with an ECR Source Using Methane/Hydrogen Chemistry in an Argon Plasma
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Overview
status
publication date
- 2007
has subject area
- 0303 Macromolecular and Materials Chemistry (FoR)
- 0306 Physical Chemistry (incl. Structural) (FoR)
- 0912 Materials Engineering (FoR)
- Energy (Science Metrix)