Effects of Electron Cyclotron Resonance Power and Cavity Dimensions in Plasma Etching of III–V Compounds

A multipolar, tuned cavity, electron cyclotron resonance (ECR) source is applied to hydrocarbon plasma etching of InP . Various ECR modes are created at different cavity dimensions and etch properties have been studied as a function of this parameter and ECR power. These etch characteristics are correlated with in situ optical emission spectroscopy, Langmuir probe, and secondary ion mass spectrometry diagnostics. Relative concentrations of …