Three-dimensional chemical mapping by scanning transmission X-ray spectromicroscopy

Three-dimensional (3-d) chemical mapping using angle-scan tomography in a scanning transmission X-ray microscope is demonstrated. Apparatus, experimental procedures and data processing are presented and the 3-d spatial resolution is evaluated. The technique is illustrated using mapping of a low-density acrylate polyelectrolyte in and outside of polystyrene microspheres dispersed in water in a 4 microm-diameter microcapillary. The 3-d chemical visualization provides information about the microstructure that had not previously been observed.