Investigation of terbium-doped silicon oxide thin films: comparison of TEM images prepared by FIB and mechanical methods

This study characterizes the optical and structural properties of terbium-doped oxygen-rich silicon oxide (ORSO:Tb) thin films and investigates focused ion beam (FIB)-induced damage on transmission electron microscopy (TEM) lamellae prepared from these films. While there are significant advantages to the FIB technique, there is a potential that energetic ions used during the FIB process can damage the lamellae. A comparative analysis of TEM …