Optical and Mechanical Properties of Europium-Doped Silicon Nitride Thin Films Deposited by ECR-PECVD with Magnetron Sputtering

Optical and mechanical properties of europium (Eu)-doped silicon nitride (SixNy) films were investigated as a function of the sputtering power applied to the Eu metal target and argon flow into the deposition chamber. Films were fabricated by an electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR-PECVD) system combined with magnetron sputtering for in situ rare-Earth doping. Results show that Eu-doped SixNy films …