Optical and Mechanical Properties of Europium-Doped Silicon Nitride Thin Films Deposited by ECR-PECVD with Magnetron Sputtering
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Overview
status
publication date
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Research
keywords
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CLUSTERS
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ECR-PECVD
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LUMINESCENCE
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Materials Science
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Materials Science, Multidisciplinary
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Physical Sciences
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Physics
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Physics, Applied
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SI-RICH
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Science & Technology
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Technology
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X-ray diffraction
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luminescence - rare earth ions
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silicon
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thin film growth
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