Investigation of Source/Drain Height Variation and Its Impacts on FinFET and GAA Nanosheet FET Journal Articles uri icon

  •  
  • Overview
  •  
  • Research
  •  
  • Identity
  •  
  • Additional Document Info
  •  
  • View All
  •  

authors

  • Ma, Mingyu
  • Li, Cong
  • Ma, Jianghao
  • Yang, Wangjun
  • Li, Haokun
  • You, Hailong
  • Deen, Jamal

publication date

  • March 10, 2025