Investigation of Source/Drain Height Variation and Its Impacts on FinFET and GAA Nanosheet FET

As semiconductor technology and process nodes advance, three-dimensional devices like FinFET and NSFET are increasingly becoming the primary choice, replacing planar MOSFETs. However, the complex manufacturing processes and high process sensitivity of three-dimensional devices at advanced process nodes inevitably cause significant deviations from the ideal structure during actual fabrication, leading to notable changes in their electrical …