Chapter
Characterization of Plasma Damage for Low-k Dielectric Films
Authors
Shi H; Huang H; Smith RS; Ho PS
Book title
METROLOGY AND DIAGNOSTIC TECHNIQUES FOR NANOELECTRONICS
Editors
Ma Z; Seiler DG
Pagination
pp. 541-588
Publisher
PAN STANFORD PUBLISHING PTE LTD
Publication Date
January 1, 2017
ISBN-13
978-981-4745-08-6