Characterization of Plasma Damage for Low-k Dielectric Films
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Overview
Research
keywords
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CONSTANT
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Engineering
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Engineering, Electrical & Electronic
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Instruments & Instrumentation
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Nanoscience & Nanotechnology
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PERFORMANCE
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POROSITY
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SPECTROSCOPY
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Science & Technology
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Science & Technology - Other Topics
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TRIMETHYLCHLOROSILANE
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Technology
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VACUUM-ULTRAVIOLET
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YIELDS
Identity
International Standard Book Number (ISBN) 13
Additional Document Info