X-ray tomography of polarization effects on deep laser-machined microgrooves
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Overview
status
publication date
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Research
keywords
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3D imaging
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ABLATION
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Branching
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DAMAGE
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Deep grooves
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Engineering
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Engineering, Manufacturing
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FABRICATION
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Femtosecond laser
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GROOVES
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High aspect ratio grooves
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METALS
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MORPHOLOGY
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Machining
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PHASE
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Polarization
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SILICON
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SIZE
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SURFACE
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Science & Technology
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Technology
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Ultrafast laser
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X-ray tomography
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