Journal article
A Moderate Confinement O-, S-, C-, and L-Band Silicon Nitride Platform Enabled by a Rapid Prototyping Integrated Photonics Foundry Process
Abstract
We describe a rapid prototyping process for silicon nitride photonic integrated circuits operating at wavelengths around 1.3 and 1.5 m. Moderate confinement silicon nitride waveguides and other essential integrated photonic components, such as fiber-chip couplers, microring resonators, multimode interference-based 3-dB power splitters, and subwavelength grating metamaterial waveguides, were fabricated and characterized and are reported. The …
Authors
Naraine CM; Hashemi B; Taleghani NM; Westwood-Bachman JN; Horvath C; Frare BLS; Mbonde HM; Ahmadi PT; Setzer K; McKinlay A
Journal
IEEE Photonics Journal, Vol. 16, No. 6, pp. 1–15
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
DOI
10.1109/jphot.2024.3503287
ISSN
1943-0647