Synthesis, characterization, volatility, and thermal stability of fluorinated copper(II) aminoalkoxide complexes as potential vapour deposition precursors
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Overview
publication date
has subject area
published in
Research
keywords
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ALD precursors
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ALKOXIDES
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ATOMIC LAYER DEPOSITION
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Chemistry
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Chemistry, Multidisciplinary
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Physical Sciences
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SURFACE
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Science & Technology
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aminoalkoxide ligands
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copper complexes
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fluorinated ligands
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thermal stability and volatility
Identity
Digital Object Identifier (DOI)
Additional Document Info