Journal article
SIMS depth profiling of implanted helium in pure iron using CsHe+ detection mode
Abstract
Helium distribution in implanted monocrystalline and polycrystalline Fe samples has been measured by secondary ion mass spectrometry (SIMS). The use of Cs+ primary ions in conjunction with the detection of CsHe+ molecular ions was shown to be an efficient method to overcome the very high first ionization potential of helium. The implantation ranges of 60keV He ions in samples are measured about 220nm in agreement with projected ranges …
Authors
Lefaix-Jeuland H; Moll S; Legendre F; Jomard F
Journal
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, Vol. 295, , pp. 69–71
Publisher
Elsevier
Publication Date
January 2013
DOI
10.1016/j.nimb.2012.11.003
ISSN
0168-583X