Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation Preprints uri icon

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authors

  • Mu, Gengyang
  • Snell, Nikaya
  • Zhang, Chang
  • Xie, Xitong
  • Tahvildari, Radin
  • Weck, Arnaud
  • Godin, Michel
  • St-Gelais, Raphael

publication date

  • December 16, 2021