High Q-Factor Silicon Nitride Nanomechanical Resonators Fabricated by Maskless Femtosecond Laser Micro-machining Preprints uri icon

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authors

  • Nikbakht, Roghayeh
  • Xie, Xitong
  • Weck, Arnaud
  • St-Gelais, Raphael

publication date

  • October 1, 2022