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Laser Machining of Free-Standing Silicon Nitride...
Preprint
Laser Machining of Free-Standing Silicon Nitride Membranes
Authors
Xie X; Nikbakht R; Couillard M; St-Gelais R; Weck A
Publication date
January 1, 2022
DOI
10.2139/ssrn.4300242
Preprint server
SSRN Electronic Journal
Associated Experts
Arnaud Weck
Adjunct Assistant Professor, Faculty of Engineering
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