Structural and Optical Properties of PECVD TiO2-SiO2Mixed Oxide Films for Optical Applications
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Overview
status
publication date
- September 2016
has subject area
- 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics (FoR)
- 0306 Physical Chemistry (incl. Structural) (FoR)
- 0912 Materials Engineering (FoR)
- Applied Physics (Science Metrix)
published in
- Plasma Processes and Polymers Journal