InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides Journal Articles uri icon

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authors

  • Liu, B
  • Landesman, Jean-Pierre
  • Leclercq, J-L
  • Rhallabi, A
  • Cardinaud, C
  • Guilet, S
  • Pommereau, F
  • Avella, M
  • González, MA
  • Jiménez, J

publication date

  • February 2006