Soft X-ray spectro-ptychography on boron nitride nanotubes, carbon nanotubes and permalloy nanorods

Spectro-ptychography offers improved spatial resolution and additional phase spectral information relative to that provided by scanning transmission X-ray microscopes (STXM). However, carrying out ptychography at the lower range of soft X-ray energies (e.g., below 200 eV to 600 eV) on samples with weakly scattering signals can be challenging. We present soft X-ray ptychography results at energies as low as 180 eV and illustrate the capabilities with results from permalloy nanorods (Fe 2p), carbon nanotubes (C 1s), and boron nitride bamboo nanostructures (B 1s, N1s). We describe optimization of low energy X-ray spectro-ptychography and discuss important challenges associated with measurement approaches, reconstruction algorithms, and their effects on the reconstructed images. A method for evaluating the increase in radiation dose when using overlapping sampling is presented.