In this paper, the tool wear mechanism in low-frequency vibration-assisted drilling (LF-VAD) of carbon fiber reinforced polymer (CFRP)/Ti6Al4V stacks has been proposed using variably machining parameters. Based on the kinematics analysis, the effect of vibration amplitude on the chip formation, uncut chip thickness, chip radian, and axial velocity was presented. Subsequently, the effect of LF-VAD on the cutting temperature, tool wear, delamination, and geometrical accuracy was presented for different vibration amplitude. The LF-VAD with the utilization of minimum quantity lubricant (MQL) resulted in a successful drilling process of 50 holes, with a 63 % reduction of the cutting temperature. For the rake face, LF-VAD reduced the adhered height of Ti6Al4V by 80 % at low cutting speed and reduced the crater depth by 33 % at the high cutting speed. On the other hand, LF-VAD reduced the flank wear land by 53 %. Furthermore, LF-VAD showed a significant enhancement on the CFRP delamination, geometrical accuracy, and burr formation.