Journal article
Analysis of wafer fabrication facilities using four variations of the open queueing network decomposition model
Abstract
Authors
Miltenburg J; Cheng CH; Yan H
Journal
IIE Transactions, Vol. 34, No. 3, pp. 263–272
Publisher
Springer Nature
Publication Date
March 1, 2002
DOI
10.1023/a:1012481300018
ISSN
0740-817X