Journal article
Effects of different processing parameters on laser water jet-machining silicon
Abstract
Laser water jet processing is a new hybrid method developed on the basis of traditional laser processing technology. It combines high laser processing efficiency with the impact and cooling effects of water jets. Laser water jet processing can effectively process hard and brittle materials such as silicon. In-depth study of the processing technology has important practical significance. For this reason, the controlled variable method is used to …
Authors
Chen Y; Li X; Chen X; Li H
Journal
Thermophysics and Aeromechanics, Vol. 29, No. 6, pp. 929–939
Publisher
Pleiades Publishing
Publication Date
November 1, 2022
DOI
10.1134/s0869864322060130
ISSN
0869-8643