Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry
Journal Articles
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Overview
status
publication date
- December 2013
has subject area
- 0302 Inorganic Chemistry (FoR)
- 0306 Physical Chemistry (incl. Structural) (FoR)
- 0399 Other Chemical Sciences (FoR)
- General Chemistry (Science Metrix)
published in
- Coordination Chemistry Reviews Journal