Ultrathin Gas Permeable Oxide Membranes for Chemical Sensing: Nanoporous Ta2O5 Test Study

Conductometric gas sensors made of gas permeable metal oxide ultrathin membranes can combine the functions of a selective filter, preconcentrator, and sensing element and thus can be particularly promising for the active sampling of diluted analytes. Here we report a case study of the electron transport and gas sensing properties of such a membrane made of nanoporous Ta₂O₅. These membranes demonstrated a noticeable chemical sensitivity toward …