authors
- Mu, Gengyang
- Snell, Nikaya
- Zhang, Chang
- Xie, Xitong
- Tahvildari, Radin
- Weck, Arnaud
- Godin, Michel
- St-Gelais, Raphael
Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors
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status
publication date
- February 2023
has subject area
- 0906 Electrical and Electronic Engineering (FoR)
- 0910 Manufacturing Engineering (FoR)
- 0913 Mechanical Engineering (FoR)
- Nanoscience & Nanotechnology (Science Metrix)