Crystal orientation effects on the surface morphology produced by ion bombardment of a pure element: Implications for quantitative surface analysis

Abstract The effect of crystal orientation and surface morphology on the detected Auger current was investigated using a Polycrystalline Mo sample. The sample was initially polished to a uniform and featureless surface morphology. Two large grains were used in the study, with their crystal orientation determined as ∼(100) for the low‐index grain and ∼(1, 4, 11) for the high‐index grain. Ion bombardment conditions used were typical for surface …