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Auger and x‐ray characterization of surface nitride films on Ti, Zr, and Hf
Journal Articles
View record in Web of Science ®
Overview
Research
Identity
Additional Document Info
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Overview
authors
Dawson, Peter Thomas
Stazyk, SAJ
status
published
publication date
May 1982
published in
Journal of Vacuum Science and Technology
Journal
Research
keywords
Physical Sciences
Physics
Physics, Applied
Science & Technology
Identity
Digital Object Identifier (DOI)
10.1116/1.571732
Additional Document Info
start page
36
end page
41
volume
21
issue
1