Journal article
Auger and x‐ray characterization of surface nitride films on Ti, Zr, and Hf
Authors
Dawson PT; Stazyk SAJ
Journal
Journal of Vacuum Science and Technology, Vol. 21, No. 1, pp. 36–41
Publisher
American Vacuum Society
Publication Date
January 1, 1982
DOI
10.1116/1.571732
ISSN
0022-5355