Journal article
Spatially Resolved Studies of Copper Electroplating by Scanning Transmission X-Ray Microscopy
Authors
Qin Z; Lee V; Hitchcock AP
Journal
ECS Meeting Abstracts, Vol. MA2013-01, No. 25, pp. 996–996
Publisher
The Electrochemical Society
Publication Date
March 8, 2013
DOI
10.1149/ma2013-01/25/996
ISSN
2151-2043