Journal article
Properties of Si Nanocrystals Formed in Inductively Coupled Plasma CVD Grown SiOx Thin Films
Authors
Roschuk T; Comedi D; Zalloum O; Wojcik J; Chelomentsev E; Flynn M; Mascher P
Journal
ECS Meeting Abstracts, Vol. MA2006-01, No. 8, pp. 364–364
Publisher
The Electrochemical Society
Publication Date
February 17, 2006
DOI
10.1149/ma2006-01/8/364
ISSN
2151-2043