Properties of Si Nanocrystals Formed in Inductively Coupled Plasma CVD Grown SiOx Thin Films Academic Article uri icon

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abstract

  • Abstract not Available.

authors

  • Roschuk, Tyler
  • Comedi, David
  • Zalloum, Othman
  • Wojcik, Jacek
  • Chelomentsev, Evgueni
  • Flynn, Mike
  • Mascher, Peter

publication date

  • February 17, 2006