The Effects of Deposition Parameters and Annealing Treatments on the Structure of Si-Rich Silicon Nitride and Oxynitride Thin Films Academic Article uri icon

  •  
  • Overview
  •  
  • Identity
  •  
  • Additional Document Info
  •  
  • View All
  •  

abstract

  • Abstract not Available.

publication date

  • September 28, 2007