(Invited) Characterization of Novel Nanostructured Terbium Doped Oxygen Rich Silicon Oxide for Photonic Applications

Rare earth doped silicon-based thin films can be used for light emitting applications, where the control of dopant type and concentration plays a significant role in the enhancement of optical functionalities [1]. In this work, nanostructured terbium (Tb) doped oxygen-rich silicon oxide (ORSO) samples were fabricated using a novel fabrication technique: integrated sputtering and plasma enhanced chemical vapor deposition (PECVD) [2]. The Tb …