Effect of Sputtering Parameters on the Optical Properties of Luminescent Eu-Doped SiOx Thin Films

Luminescent silicon (Si) based structures that are compatible with the existing complementary metal oxide semiconductor industry has drawn significant interest with the vision of developing an integrated optoelectronic platform on monolithic Si [1]. Such luminescent structures find several applications in inter- and intra-chip optical interconnects, microdisplay, biological detections, and solid-state lighting [2, 3]. The outstanding optical …