(Invited) Universal Ion Implantation System for Use in the Preparation of Doped Silicon Dielectric Films Academic Article uri icon

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abstract

  • Abstract not Available.

authors

  • Knights, Andy P
  • Savidge, Rachel M
  • Stevanovic, Doris V
  • Kleiman, Rafael
  • Chivers, David

publication date

  • February 15, 2012