Journal article
ELNES and EDS Mapping in HfOxNy Thin Films and AlN/TiN Superlattices
Abstract
Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.
Authors
Couillard M; Lee M-S; Landheer D; Pankov VV; Prince RH; Botton GA
Journal
Microscopy and Microanalysis, Vol. 10, No. S02, pp. 308–309
Publisher
Oxford University Press (OUP)
Publication Date
August 2004
DOI
10.1017/s1431927604887634
ISSN
1431-9276