Scholarly Works

ELNES and EDS Mapping in HfOxNy Thin Films and...

Journal article

ELNES and EDS Mapping in HfOxNy Thin Films and AlN/TiN Superlattices

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Authors

Couillard M; Lee M-S; Landheer D; Pankov VV; Prince RH; Botton GA

Journal

Microscopy and Microanalysis, Vol. 10, No. S02, pp. 308–309

Publisher

Oxford University Press (OUP)

Publication Date

August 1, 2004

DOI

10.1017/s1431927604887634

ISSN

1431-9276

Associated Experts

Gianluigi Botton

Professor Emeritus, Faculty of Engineering

Labels

Fields of Research (FoR)

40 Engineering 4016 Materials engineering 3101 Biochemistry and cell biology

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