ELNES and EDS Mapping in HfOxNy Thin Films and AlN/TiN Superlattices Journal Articles

abstract

• Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

authors

• Couillard, Martin
• Lee, M-S
• Landheer, Dolf
• Pankov, Vladimir V
• Prince, Robert H
• Botton, Gianluigi

status

• published 

publication date

• August 2004

has subject area

• 0204 Condensed Matter Physics (FoR)
• 0601 Biochemistry and Cell Biology (FoR)
• 0912 Materials Engineering (FoR)
• Microscopy (Science Metrix)

published in

• Microscopy and Microanalysis  Journal

keywords

• 40 Engineering
• 4016 Materials Engineering

Digital Object Identifier (DOI)

• 10.1017/s1431927604887634

start page

• 308

end page

• 309

volume

• 10

issue

• S02