Journal article
New Reaction Chemistries for Late Transition Metal Atomic Layer Deposition
Authors
Vidjayacoumar B; Ramalingam V; Kleinberger R; Emslie DJ; Blackwell J; Clendenning S
Journal
ECS Meeting Abstracts, Vol. MA2012-02, No. 28, pp. 2480–2480
Publisher
The Electrochemical Society
Publication Date
June 4, 2012
DOI
10.1149/ma2012-02/28/2480
ISSN
2151-2043