Journal article
In Situ Study of ALD Processes Using Synchrotron-based X-ray Fluorescence and Scattering Techniques
Authors
Dendooven J; Devloo-Casier K; Ide M; Grandfield K; Ludwig KF; Bals S; Van Der Voort P; Detavernier C
Journal
ECS Meeting Abstracts, Vol. MA2012-02, No. 28, pp. 2460–2460
Publisher
The Electrochemical Society
Publication Date
June 4, 2012
DOI
10.1149/ma2012-02/28/2460
ISSN
2151-2043