In Situ Study of ALD Processes Using Synchrotron-based X-ray Fluorescence and Scattering Techniques Journal Articles uri icon

  •  
  • Overview
  •  
  • Identity
  •  
  • Additional Document Info
  •  
  • View All
  •  

abstract

  • Abstract not Available.

authors

  • Dendooven, Jolien
  • Devloo-Casier, Kilian
  • Ide, Matthias
  • Grandfield, Kathryn
  • Ludwig, Karl F
  • Bals, Sara
  • Van Der Voort, Pascal
  • Detavernier, Christophe

publication date

  • June 4, 2012