In Situ Study of ALD Processes Using Synchrotron-based X-ray Fluorescence and Scattering Techniques Academic Article uri icon

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abstract

  • Abstract not Available.

authors

  • Dendooven, Jolien
  • Devloo-Casier, Kilian
  • Ide, Matthias
  • Grandfield, Kathryn
  • Ludwig, Karl F
  • Bals, Sara
  • Van Der Voort, Pascal
  • Detavernier, Christophe

publication date

  • June 4, 2012