Calibration of a Circular HV Magnetron Sputtering Source for in-Situ RE Doping of Ecr-PECVD Si-Based Thin Films

Rare-Earth doped silicon based luminescent materials have become an attractive solution in some key areas of technological development. For instance, in the field of silicon photonics there is a drive to replace electronic on-chip components with photonic counterparts [1-2]. One of the major challenges thus far has been to provide the monolithic integration of an efficient reliable electrically driven light source. Such an element could also be …