Investigation of the electrical stability of Si-nanowire biologically sensitive field-effect transistors with embedded Ag/AgCl pseudo reference electrode

Abstract

We report on the electrical stability of Si-nanowire biologically sensitive field-effect transistors (BioFETs) fabricated using conventional microfabrication technique, with an embedded Ag/AgCl pseudo-reference electrode (pRE) formed by an electrochemical method. The open-circuit potential (OCP) characteristics between the pRE and a commercial reference electrode have been measured in order to evaluate the influence of the pRE potential on the …