Redistribution and activation of ion implanted As in Si during RTA for concentrations around solid solubility Journal Articles

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authors

Sorensen, Erik
Shiryaev, S Yu
Nylandsted Larsen, A
Schwartz Sørensen, E
Tidemand-Petersson, P

status

published

publication date

January 1987

has subject area

0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics (FoR)
0402 Geochemistry (FoR)
0915 Interdisciplinary Engineering (FoR)
Applied Physics (Science Metrix)

published in

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms Journal