Defect Distribution across 6-Inch CZ-Silicon Wafers
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Overview
publication date
- January 1, 1992
has subject area
- 0306 Physical Chemistry (incl. Structural) (FoR)
- 0912 Materials Engineering (FoR)
- Materials (Science Metrix)
- Nanoscience & Nanotechnology (Science Metrix)
published in
- Materials Science Forum Journal