Depth Profiling of Defects in Low Temperature MBE-Grown Silicon Journal Articles uri icon

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authors

  • Jackman, TE
  • Aers, GC
  • McCaffrey, JP
  • Britton, DT
  • Willutzki, P
  • Simpson, PJ
  • Schultz, PJ
  • Mascher, Peter

publication date

  • January 1, 1992