Journal article
Depth Profiling of Defects in Low Temperature MBE-Grown Silicon
Authors
Jackman TE; Aers GC; McCaffrey JP; Britton DT; Willutzki P; Simpson PJ; Schultz PJ; Mascher P
Journal
Materials Science Forum, Vol. 105-110, , pp. 301–308
Publisher
Trans Tech Publications
Publication Date
January 1, 1992
DOI
10.4028/www.scientific.net/msf.105-110.301
ISSN
0255-5476