Journal article
Optical actuation of a micromechanical photodiode via the photovoltaic-piezoelectric effect
Abstract
Authors
Rampal A; Kleiman RN
Journal
Microsystems & Nanoengineering, Vol. 7, No. 1,
Publisher
Springer Nature
Publication Date
December 1, 2021
DOI
10.1038/s41378-021-00249-y
ISSN
2096-1030