Assessment of the strain depth sensitivity of Moiré sampling Scanning Transmission Electron Microscopy Geometrical Phase Analysis through a comparison with Dark-Field Electron Holography

In this study, the Moiré sampling Scanning Transmission Electron Microscopy Geometrical Phase Analysis (or STEM Moiré GPA) strain characterization method is compared to the well-established Dark-Field Electron Holography technique on a thin film stack grown by Molecular Beam Epitaxy. While experimental data obtained with the two techniques are, overall, in good qualitative agreement, small statistically relevant differences are locally observed …