authors Gérard, Solène Mokhtari, Merwan Landesman, Jean-Pierre Levallois, Christophe Fouchier, Marc Pargon, Erwine Pagnod-Rossiaux, Philippe Laruelle, François Moréac, Alain Ahammou, Brahim Cassidy, Daniel Thomas
has subject area 02 Physical Sciences (FoR) 09 Engineering (FoR) 10 Technology (FoR) Applied Physics (Science Metrix)
keywords Anisotropic strain Dielectric thin film EDGE-INDUCED STRESS Edge force Edge relaxation GE Materials Science Materials Science, Coatings & Films Materials Science, Multidisciplinary Mechanical stress Photoluminescence Physical Sciences Physics Physics, Applied Physics, Condensed Matter SILICON Science & Technology Silicon nitride Technology