Development of a novel electrohydrodynamic micropump with 3d electrode geometry

In this study, electrohydrodynamic (EHD) micropumps with both 2D planer electrodes and 3D micropillar electrodes were simulated under a no pressure difference condition to determine its maximum mass flow rate, and under a no-flow condition to find the maximum static pressure generated. The simulation results confirmed that the 3D micropillar electrode geometry can be expected to outperform the corresponding 2D electrode geometry. Based on the simulation results, a prototype EHD micropump with micropillar electrodes was designed and manufactured. The microfabrication techniques are discussed with particular focus on the construction of the micropillar electrodes, channel fabrication and bonding technique. Preliminary experimental results are in qualitative agreement with the numerical simulations which show a better performance with 3D micropillar electrode geometry compared with 2D electrodes.