Process design for reactive ion etching of silicones Journal Articles

authors

• Ou, Kevin
• Wu, Wen I
• Selvaganapathy, Ponnambalam

status

• published 

publication date

• 2010

has subject area

• 0910 Manufacturing Engineering (FoR)
• 0913 Mechanical Engineering (FoR)
• 0915 Interdisciplinary Engineering (FoR)

published in

• International Journal of Abrasive Technology  Journal

keywords

• 40 Engineering
• 4014 Manufacturing Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1504/ijat.2010.032837

start page

• 105

end page

• 105

volume

• 3

issue

• 2