Journal article
Process design for reactive ion etching of silicones
Authors
Ou K; Wu WI; Selvaganapathy PR
Journal
International Journal of Abrasive Technology, Vol. 3, No. 2,
Publisher
Inderscience Publishers
Publication Date
January 1, 2010
DOI
10.1504/ijat.2010.032837
ISSN
1752-2641