Journal article
A Process For Monolithic Fabrication Of Microlenses On Integrated Circuits
Authors
Popovic ZD; Sprague RA; Connell GA
Journal
Proceedings of SPIE--the International Society for Optical Engineering, Vol. 0898, , pp. 23–25
Publisher
SPIE, the international society for optics and photonics
Publication Date
June 2, 1988
DOI
10.1117/12.944557
ISSN
0277-786X