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Ultrasonic friction power during Al wire...
Journal article

Ultrasonic friction power during Al wire wedge-wedge bonding

Abstract

Al wire bonding, also called ultrasonic wedge-wedge bonding, is a microwelding process used extensively in the microelectronics industry for interconnections to integrated circuits. The bonding wire used is a 25μm diameter AlSi1 wire. A friction power model is used to derive the ultrasonic friction power during Al wire bonding. Auxiliary measurements include the current delivered to the ultrasonic transducer, the vibration amplitude of the …

Authors

Shah A; Gaul H; Schneider-Ramelow M; Reichl H; Mayer M; Zhou Y

Journal

Journal of Applied Physics, Vol. 106, No. 1,

Publisher

AIP Publishing

Publication Date

July 1, 2009

DOI

10.1063/1.3158065

ISSN

0021-8979